S. Hontsu et al., Al films as buffer layers for high-temperature superconducting thin films on amorphous substrates, IEEE APPL S, 9(2), 1999, pp. 1669-1672
We have prepared c-axis oriented YBa2Cu3O7-y (YBCO) thin films on amorphous
substrates, such as SiO2 and soda potassium glass, by using Al(111) buffer
layer. Before preparation of YBCO film, Al surface was oxidized at a subst
rate temperature of 590 degrees C under (O-2+O-3;8%) atmosphere of 1 mTorr.
This AlOx was amorphous state according to X-ray diffraction (XRD) and ref
lection high-energy electron diffraction (RHEED) measurements. YBCO films w
ere formed on amorphous substrates with the AlOx/Al layer using an ArF exci
mer laser deposition technique. The vacuum pressure and substrate temperatu
re during deposition were typically 1 mTorr and 590 degrees C, respectively
.XRD measurements indicate that all the YBCO films were predominantly orien
ted with the c-axis normal to the substrate surface. These results show tha
t the AlOx plays a role of buffer and seed layer which has periodic potenti
al of atomic order corresponding to Al(111) plane. Critical temperature T-c
(zero) of the c-axis oriented YBCO film on AlOx/Al/glass substrate was 75K.
This technique can be applied to other oxide material such as ferroelectri
c and ferromagnetic materials and is very useful to applications.