Influence of the deposition rate on crystalline structure and cation disordering of YBCO thin films

We have systematically investigated the superconducting properties of in-si tu deposited YBCO thin films as a function of the substrate temperature in the range of 650-800 OC and the deposition rate in the range of 0.1-12.2 nm /s. It was found that the cubic structure of YBCO grows at low substrate te mperatures and high deposition rates. Also, expansion of the c-lattice para meter and decrease of the critical temperature of YBCO thin films were obse rved with decreasing substrate temperature and increasing deposition rate s uggestive of cation disordering in the YBCO thin films. These results are e xplained by cation kinetics.