Despite of the long period of time elapsed since their discovery, intermeta
llic superconducting borocarbides in the form of thin films are rarely repo
rted in the literature. In this paper we present our results on the growth
of ErNi2B2C thin films by an ultra high vacuum laser ablation technique. Th
e dependence of the film structure and properties on the deposition paramet
ers has been studied and optimized. Strongly c-oriented superconducting fil
ms (rocking angle of 1 degrees) with a rather smooth surface have been obta
ined. Here we present the details of the deposition procedure as well as th
ose of the structural, morphological, and electrical characterization. The
feasibility of superconducting films with a tungsten buffer layer on MgO su
bstrate has been studied successfully. Both buffer layers and bilayers have
been characterized by X-ray reflectivity and Atomic Force Microscopy.