Scanning Hall probe measurements on single- and double-sided sputtered YBCO films for microwave applications

We have investigated the quality and the homogeneity of YBa2Cu3O7-x (YBCO) films up to phi=2 " diameter and t=360nm in thickness with a scanning Hall probe. The YBCO films were grown by high oxygen pressure sputtering with he ater temperature compensation up to T=1020 degrees C, resulting in a consta nt growth temperature for both film sides. Typical phi=1 " double-sided fil ms on LaAlO3 substrates revealed inductively Tc=87.8(88.2) K and Jc=4(4.5) MA/cm(2) for the first (second) deposited side. Surface resistance measurem ents at 87 GHz resulted in Rs(4.2K)=2.6 (1.6) m Omega. At 19GHz, Rs(4.2K)=0 .2m Omega with moderate field dependence up to Bs=15 mT was obtained for bo th sides. The scanning Hall probe measurements have been carried out after cooling the film in an external magnetic field and then switching it off. T he local Jc values deduced from the measured remanent induction B were in g ood agreement with inductive data taken at corresponding positions. Differe nt kinds of defects and inhomogeneities were investigated with a spatial re solution of 1mm.