We deposited large-area YBCO films by reactive thermal co-evaporation on bi
axially textured, Y2O3 stabilized ZrO2 (YSZ) buffer layers fabricated by an
IBAD technique (ion beam assisted deposition). Polycrystalline, partially
stabilized ZrO2 (PSZ) with a size of 10 x 10 cm was used as a substrate. Ho
mogeneous, biaxially aligned IBAD buffer layers were prepared by using larg
e ion guns and substrate rotation during the IBAD process. YBCO films with
thicknesses of up to 1400 nm were deposited. The biaxial alignment of the b
uffer layer and of the YBCO film was characterized by S-ray diffraction. Th
e FWHM of YSZ (111) cp-scans varied laterally within a range of 15 degrees
to 20 degrees. The FWHM of the YBCO (103) was always several degrees better
with value of only 7 degrees to 9 degrees. The YSZ thickness dependence of
this improvement was analyzed. We achieved a mean critical current density
of 1.9 MA/cm(2) and a maximum critical current density of 2.1 MA/cm(2) on
a substrate area of 10 x 10 cm.