The direct deposition of Y2O3 buffer layers on cube-textured nickel tape wa
s successfully performed by electron beam deposition using Y metal which ox
idized during deposition. The Y2O3 layer exhibited excellent out-of-plane a
lignment of FWHM of 2.3 similar to 4 degrees and good in-plane alignment wi
th similar to 11 degrees FWHM. Surface morphology, crystal orientation and
grain size proved to be quite sensitive to the deposition pressure. The sur
face roughness and the grain size increased with increasing deposition pres
sure, and the crystal orientation changed from (111)Y2O3 to (100)Y2O3. Subs
equently, YBCO superconducting films were deposited on (100)Y2O3 buffer lay
ers by co-evaporation deposition and pulsed-laser deposition (PLD), Though
a good in-plane alignment, as measured by X-ray phi-scan,was achieved in th
e YBCO films, their superconducting characteristics were not so good. The T
-c onset was about 84 K for the (001)YBCO by PLD. The crystal alignment and
the microstructure of YBCO superconducting films deposited by the two depo
sition techniques on cube-textured Ni tapes with Y2O3 buffer layers are com
pared.