Fabrication of large area superconducting thin film by pulsed laser scanning

In order to deposit high quality high temperature superconducting(HTS) YBCO thin films with a large area, pulsed laser scanning (PLS) method was tried and the thickness distribution of thin film was investigated. The large ar ea YBa2Cu3O7-x thin films on the phi 36 mm diameter LaAlO3 and phi 42 mm di ameter Y-ZrO2 (YSZ) single crystal substrates were obtained by rotating the lens with radius of 9 and 12.9 mm. The critical temperatures T-C of thin f ilms at the center and edge were all 90 K. The critical current density J(C ) at 77 K and zero magnetic field is over 10(6) A/cm(2). The X-ray diffract ion showed that the thin films are completely c-axis oriented. The V-I char acteristics of the thin films were also investigated in this paper.