We have studied the effect of oxygen pressure (PO,) during pulsed laser dep
osition on the properties of YBCO films, with particular attention to the l
ow power microwave surface resistance R-s. Above a threshold oxygen pressur
e the properties of the films are nearly independent of PO2 during depositi
on and are typical of high quality YBCO films. The films made below this th
reshold pressure have increased disorder which produces a reduced T-c and a
n expanded c-axis lattice parameter. However, these films also have signifi
cantly reduced low temperature R-s, which is likely a direct result of the
increased scattering in these films. Preliminary Raman measurements show no
increase in the Y-Ba cation disorder in these low PO2 films, so that a dif
ferent disorder mechanism must be present.