Ml. Seaford et al., The use of computer controlled group V valved sources for interface type control in InGaSb/InAs strained layer superlattices, J ELEC MAT, 28(8), 1999, pp. 955-958
The purpose of this research is to demonstrate the necessity of computer co
ntrolled valved group V effusion cell sources in the growth of indium galli
um antimonide/indium arsenide (InGaSb/InAs). These sources allow enhanced c
ontrol of the group V flux. This flux control allows the reduction of unwan
ted cross contamination and complete control of the interface type. For sim
ple structures, this control can be done manually, however, for complicated
structures the control must be automated to allow for reproducibility and
uniformity. The InGaSb/InAs strained layer superlattice (SLS) is an example
of a complicated structure with hundreds of layers that requires interface
type control. Arsenic incorporation with typical flux shuttering was found
to be a problem in the growth of antimonide layers and limit interface typ
e control. The antimony incorporation was not found to occur for the growth
of arsenide layers. In addition, antimony exposure to critical interfaces
did not appear to reduce the interface quality. This research demonstrates
that the use of computer controlled valve sources is only required for the
arsenic source when attempting to create InGaSb/InAs SLS structures.