The use of computer controlled group V valved sources for interface type control in InGaSb/InAs strained layer superlattices

Citation
Ml. Seaford et al., The use of computer controlled group V valved sources for interface type control in InGaSb/InAs strained layer superlattices, J ELEC MAT, 28(8), 1999, pp. 955-958
Citations number
6
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
JOURNAL OF ELECTRONIC MATERIALS
ISSN journal
03615235 → ACNP
Volume
28
Issue
8
Year of publication
1999
Pages
955 - 958
Database
ISI
SICI code
0361-5235(199908)28:8<955:TUOCCG>2.0.ZU;2-8
Abstract
The purpose of this research is to demonstrate the necessity of computer co ntrolled valved group V effusion cell sources in the growth of indium galli um antimonide/indium arsenide (InGaSb/InAs). These sources allow enhanced c ontrol of the group V flux. This flux control allows the reduction of unwan ted cross contamination and complete control of the interface type. For sim ple structures, this control can be done manually, however, for complicated structures the control must be automated to allow for reproducibility and uniformity. The InGaSb/InAs strained layer superlattice (SLS) is an example of a complicated structure with hundreds of layers that requires interface type control. Arsenic incorporation with typical flux shuttering was found to be a problem in the growth of antimonide layers and limit interface typ e control. The antimony incorporation was not found to occur for the growth of arsenide layers. In addition, antimony exposure to critical interfaces did not appear to reduce the interface quality. This research demonstrates that the use of computer controlled valve sources is only required for the arsenic source when attempting to create InGaSb/InAs SLS structures.