In MRF the mechanical energy for material removal is generated by the hydro
dynamic flow of a magnetorheological (MR) polishing suspension throughout a
preset converging gap formed by the workpiece surface and a moving rigid w
all. MRF reduces the surface microroughness of optical materials to less th
an or equal to 10 Angstrom. Shape errors are corrected to a fraction of a w
avelength of light and subsurface damage is removed.