Aerosol-assisted chemical vapour deposition (AACVD) of silver films from triphenylphosphine adducts of silver beta-diketonates and beta-diketoiminates, including the structure of [Ag(hfac)(PPh3)]
Da. Edwards et al., Aerosol-assisted chemical vapour deposition (AACVD) of silver films from triphenylphosphine adducts of silver beta-diketonates and beta-diketoiminates, including the structure of [Ag(hfac)(PPh3)], J MAT CHEM, 9(8), 1999, pp. 1771-1780
Triphenylphosphine adducts of silver beta-diketonates [AgL(PPh3)] (L = acac
, dpm, tfac, hfac, fod) and beta-ketoiminates (L = hfacNhex, hfacNchex) hav
e been synthesised and evaluated as precursors for the deposition of silver
films using aerosol-assisted chemical vapour deposition methodology. The 1
:1 stoichiometry of the adducts has been established by P-31 and Ag-109 NMR
and a crystal structure of [Ag(hfac)(PPh3)]. The best films were obtained
from the two beta-ketoiminates, particularly L = hfacNhex. While [AgL(PPh3)
] (L = acac, dpm) gave almost no deposition, the complex with L = tfac gave
a film comparable with the two beta-ketoiminates while other films showed
poor reflectivity (L= hfac, fod).