Aerosol-assisted chemical vapour deposition (AACVD) of silver films from triphenylphosphine adducts of silver beta-diketonates and beta-diketoiminates, including the structure of [Ag(hfac)(PPh3)]

Authors
Edwards, DA Harker, RM Mahon, MF Molloy, KC
Citation
Da. Edwards et al., Aerosol-assisted chemical vapour deposition (AACVD) of silver films from triphenylphosphine adducts of silver beta-diketonates and beta-diketoiminates, including the structure of [Ag(hfac)(PPh3)], J MAT CHEM, 9(8), 1999, pp. 1771-1780
Citations number
32
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF MATERIALS CHEMISTRY
ISSN journal
09599428 → ACNP
Volume
9
Issue
8
Year of publication
1999
Pages
1771 - 1780
Database
ISI
SICI code
0959-9428(1999)9:8<1771:ACVD(O>2.0.ZU;2-U
Abstract
Triphenylphosphine adducts of silver beta-diketonates [AgL(PPh3)] (L = acac , dpm, tfac, hfac, fod) and beta-ketoiminates (L = hfacNhex, hfacNchex) hav e been synthesised and evaluated as precursors for the deposition of silver films using aerosol-assisted chemical vapour deposition methodology. The 1 :1 stoichiometry of the adducts has been established by P-31 and Ag-109 NMR and a crystal structure of [Ag(hfac)(PPh3)]. The best films were obtained from the two beta-ketoiminates, particularly L = hfacNhex. While [AgL(PPh3) ] (L = acac, dpm) gave almost no deposition, the complex with L = tfac gave a film comparable with the two beta-ketoiminates while other films showed poor reflectivity (L= hfac, fod).