Soft x-ray diffraction anomalous fine structure on Ni/V multilayers

We report on anomalous soft x-ray scattering experiments on Ni/V multilayer s. The fine structure above the L-2.3 absorption edges of V, observed using the first order multilayer reflection, can be interpreted as diffraction a nomalous fine structure (DAFS), from which information on the local structu re of V can be obtained. This interpretation is in agreement with extended x-ray absorption fine structure (EXAFS) results obtained in transmission mo de on a similar Ni/V multilayer. The results demonstrate that the DAFS tech nique can be employed for multilayer analysis in the soft x-ray region in a similar fashion as for crystalline materials in the hard x-ray region.