A depth profile study of the structure and strain distribution in chemically grown Cu films on AlN

We have studied Cu coatings grown on AIN substrates via a polyol deposition method using grazing incidence X-ray (GIXS) techniques and small angle sca ttering techniques to determine the dependence of film structure on depth a s well as the presence of nanometer size structures in the films. Small ang le measurements indicate the presence of ordered structures in the order of 4 nm close to the surface of the films. Depth studies using different X-ra y energies in combination with the GIXS technique suggest the first 20 to 6 0 nm of the film correspond to a textured region, with strains ranging betw een +0.1% to -0.6%. The azimuthal ordering in the plane of the films depend s on the sample deposition time and the substrate orientation. (C) 1999 Act a Metallurgica Inc.