Lj. Martinez-miranda et al., A depth profile study of the structure and strain distribution in chemically grown Cu films on AlN, NANOSTR MAT, 12(5-8), 1999, pp. 653-656
We have studied Cu coatings grown on AIN substrates via a polyol deposition
method using grazing incidence X-ray (GIXS) techniques and small angle sca
ttering techniques to determine the dependence of film structure on depth a
s well as the presence of nanometer size structures in the films. Small ang
le measurements indicate the presence of ordered structures in the order of
4 nm close to the surface of the films. Depth studies using different X-ra
y energies in combination with the GIXS technique suggest the first 20 to 6
0 nm of the film correspond to a textured region, with strains ranging betw
een +0.1% to -0.6%. The azimuthal ordering in the plane of the films depend
s on the sample deposition time and the substrate orientation. (C) 1999 Act
a Metallurgica Inc.