Materials modifications in heavy ion interactions with single crystals andtheir ion beam characterization

Materials modifications in several hundred keV to a few MeV heavy ion inter actions with single crystalline solids have been discussed. For the analysi s of the modified layers mainly Rutherford backscattering spectrometry and channeling experiments have been performed with MeV He+, Li2+ and B2+ ions. Reviewing the recent work in the author's laboratory, examples of various kinds of modifications, such as, impurity incorporation at lattice sites, i on beam synthesis of buried epitaxial layers, modification of vaporization behavior and evolution of clusters have been presented. (C) 1999 Elsevier S cience B.V. All rights reserved.