The discrete sources method (DSM) is extended to investigate complete mathe
matical models for light scattering from various kinds of silicon wafers fe
atures. Computer simulations demonstrate the usefulness of the DSM for comp
aring scatter signals associated with different surface features. Wafer fea
tures such as contaminating particles, subsurface defects and pits are inve
stigated. (C) 1999 Society of Photo-Optical Instrumentation Engineers.