PRECISE MEASURING METHOD FOR DETECTING THE IN-SITU DISTORTION PROFILEOF A HIGH-HEAT-LOAD MIRROR FOR SYNCHROTRON-RADIATION BY USE OF A PENTAPRISM LONG TRACE PROFILER
Sn. Qian et al., PRECISE MEASURING METHOD FOR DETECTING THE IN-SITU DISTORTION PROFILEOF A HIGH-HEAT-LOAD MIRROR FOR SYNCHROTRON-RADIATION BY USE OF A PENTAPRISM LONG TRACE PROFILER, Applied optics, 36(16), 1997, pp. 3769-3775
A precise measuring method for detecting the in situ distortion profil
e of a high-heat-load mirror for synchrotron radiation by use of a pen
taprism long trace profiler (LTP) is presented. A maximum distortion o
f 0.47 mu m across a length of 180 mm was measured for an internally w
ater-cooled mirror on an undulator beam line at ELETTRA while exposed
to a total emitted power of 600 W. This first successfully tested in s
itu distortion profile points out the importance and need for this met
hod. Two configurations for performing in situ LTP tests are discussed
. For this measurement the configuration with all the equipment extern
al to the vacuum chamber was used. The experiment has an accuracy and
a repeatability of 0.04 mu m. Suggestions for improving the accuracy a
nd stability are presented. (C) 1997 Optical Society of America.