On the long pulse operation of an x-ray preionized, gas discharge pumped ArF excimer laser

Long laser pulses of up to 120 ns full width at half maximum have been achi eved in a discharge pumped ArF laser, using x-ray preionization and prepuls e-mainpulse excitation using a magnetic switch. For the realization of thes e long pulse lengths a fast current rise time in the first stage of the dis charge is a crucial factor. The laser performance depends strongly on the d ischarge stability, and thus on the partial pressure of the fluorine in the laser gas mixture. (C) 1999 American Institute of Physics. [S0003-6951(99) 01034-7].