Structure and some electrical properties of amorphous diamond-like carbon films

Diamond-like carbon (DLC) layers deposited at room temperature in 27.12 MHz radiofrequency methane plasma have been studied. The results of structural identification and roughness characterization of the DLC films are reporte d. AFM images and Raman spectra analysis of investigated samples revealed t hat, in the RF PCVD technique, amorphous hard carbon film are produced. Tra p levels in DLC films are investigated by using the thermally stimulated cu rrent (TSC) technique. The open-circuit technique was applied for the drift mobility measurements. Thermally activated hopping is a predominant mechan ism of charge carrier transport in the considered range of temperature for amorphous diamondlike carbon films. (C) 1999 Elsevier Science Ltd. All righ ts reserved.