On the better quality of wet-grown gate oxides

The quality of the gate oxide grown by using both wet and dry oxidation has been studied with respect to the local oxidation atmosphere. Dedicated tes ts have shown that the difference between wet- and dry-grown gate oxide is strongly influenced by the previous local oxidation process. A superior qua lity of wet gate oxide is evident if wet local oxidation has been used, whi le negligible dependence of gate oxide quality on the gate oxidation ambien t is obtained when dry local oxidation is applied. (C) 1999 The Electrochem ical Society. S1099-0062(99)03-110-7-X. All rights reserved.