Leakage conduction of Pt-Pb(ZrXTi:(1-X))O-3-Pt capacitors is studied by mea
ns of different measuring techniques and analyzed in terms of semiconductor
properties of the system. Based on the experimental data, it is concluded
that two different regimes of carrier injection (with the critical electric
field of the crossover between these regimes being independent of the meas
uring technique) are responsible for true leakage conduction in Pt-Pb(ZrXTi
1-X)O-3-Pt films. For interpretation of the experimental results a Space-Ch
arge-Influenced-Injection model which takes into account both role of charg
e of depletion in the bulk of the film and injection through the blocking c
ontact is proposed. This model describes well the main features of the obse
rved current-voltage characteristics and provides a reasonable fit for the
current-voltage curves measured at elevated temperatures, the values of the
fitting parameters being in a good agreement with the results of other stu
dies. The presented study provides insight in me physical nature of leakage
conduction of Pt-Pb(ZrXTi1-X)O-3-Pt system and suggests a method for analy
zing its semiconductor parameters by means of conduction measurements.