Ferroelectric SrBi2Ta2O9 (SBT) thin films have been grown epitaxially on YB
CO/LaAlO3 (100) substrates by using a Nd:YAG pulsed laser deposition techni
que. The films are found to be highly c-axis oriented epitaxial and the x-r
ay diffraction (XRD) rocking curves show a narrow FWHM about 0.84 degrees f
or SET (0012) peak. The high epitaxial quality of such films are also evide
nced by XRD phi scans, and atomic force microscopy (AFM) measurements, whic
h reveal a mosaic structure of the SET films. The feature size of the mosai
cs is around 1 mu m with an average roughness of about 10nm. The electrical
properties of the films such as polarization, dielectric permittivity have
also been studied. It is found that the polarization of SET along c-axis i
s much very small (Pr=1.1 mu C/cm(2)) and the dielectric constant of the ep
itaxial film is around 200.