Characterization of a linear venetian-blind macroparticle filter for cathodic vacuum arcs

The cathodic vacuum are is a simple means of creating a highly ionized meta l or carbon plasma, which can be used to produce a wide variety of metal an d metal compound thin films. In order to produce smooth, defect-free films suitable for optical and electronic applications, the plasma needs to be fi ltered of micrometer-sized molten and solid cathode debris known as macropa rticles, To date, most of the research effort on plasma filtering has been focused on development and optimization of magnetic filter designs based on curved solenoids, Ryabchikov et al, proposed and employed novel filter des igns for a combined plasma and ion beam source. The new designs are based o n a nested set of conical plates in one version and a set of angled plates ("venetian blind") in another. In the present work, we report on a detailed characterization of the operation of a filter employing a linear venetian blind geometry. The effects of parameters such as plate and are currents, a s well as plate bias on the throughput and deposition profile are reported.