Scanning tunnelling microscopy studies of silicides

We review the topic of scanning tunnelling microscopy (STM) studies of sili cides, with an emphasis on fundamental scientific issues that can be addres sed using STM and ballistic-electron-emission microscopy (BEEM). The discus sion is organized according to the topics of structure (atomic scale precur sors, surface reconstructions, bulk structures, interfaces) kinetics and gr owth (direct atomic measurement, modelling, stoichiometry, layer and island growth, phase transitions and nanoscale metallization) and BEEM (method, b and structure, Schottky barrier, defect scattering, inelastic scattering an d surface effects). These topics are described in general terms, then elabo rated with specific examples.