Fitting a simple model of inelastic scattering in Monte Carlo code to experimental data

Monte Carlo simulations are a very useful tool for simulating many physical processes. The method has often been used for electron microscopy, spectro scopy and microanalysis. In this paper, the backscattering coefficient and coefficient of elastic reflection in the energy range 0.2-5 keV for C, Al, Cu, Ag and Au is simulated and compared with literature data. For the elast ic cross sections the program PWADIR was used, whereas for inelastic ones t he simple hyperbolic distribution of energy losses was utilized. Due to the hyperbolic shape, one free parameter, the minimal energy loss W-min appear s. This quantity hardly influences the dependence of the backscattering coe fficient on primary energy, but strongly influences the energy dependence o f the coefficient of elastic reflection. By comparison of the calculated an d measured values of this coefficient we were able to find the optimal valu es of W-min, and, due to mutual dependence, the 'experimental' values of th e inelastic mean free path lambda(in). The calculated and measured energy d ependence of the backscattering coefficient and the coefficient of elastic reflection have shown, in the mentioned energy range, reasonable agreement for all the elements studied.