An attempt to assess the influence of diffusion on localized impedance meas
urements by means of probe method is presented. The influence has been demo
nstrated and discussed by experiments and computer simulations. When the pr
obe is positioned within the diffusion layer, the measured localized impeda
nce spectra could be different from the conventional electrochemical impeda
nce measurements due to the heterogeneous concentration distribution. The d
eviations can be de density-dependent when the variation of conductivity is
the predominant reason of the influence. When the influence of diffusion i
s predominately due to the redox potential difference at the probe, the dev
iation can be less de-dependent. The influence at low frequency range is mo
re serious than at high frequency range. (C) 1999 The Electrochemical Socie
ty. S0013-4651(98)10-048-3. All rights reserved.