Relations between the solubility speed and the electrical conductivity of phenol novolak polymer solutions

Authors
Takeda, T Saka, M
Citation
T. Takeda et M. Saka, Relations between the solubility speed and the electrical conductivity of phenol novolak polymer solutions, J VAC SCI B, 17(4), 1999, pp. 1380-1384
Citations number
4
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
ISSN journal
10711023 → ACNP
Volume
17
Issue
4
Year of publication
1999
Pages
1380 - 1384
Database
ISI
SICI code
1071-1023(199907/08)17:4<1380:RBTSSA>2.0.ZU;2-N
Abstract
Relations between the solubility speed of phenol novolak resins which are t ypical photoresist base polymers, with the ac-electrical conductivity of th eir polymer solutions were studied. Strong correlations between these quant ities were found. These relations were found to be affected by the concentr ation of the solution and the measured temperature. It is suggested to use such relations to predict the solubility speed of photosensitive novolak po lymers by measuring their ac-electrical conductivity instead of measuring t he solubility speed directly. (C) 1999 American Vacuum Society. [S0734-211X (99)08004-X].