Microelectron gun integrating a point-source cathode

Authors
Hammadi, Z Gauch, M Morin, R
Citation
Z. Hammadi et al., Microelectron gun integrating a point-source cathode, J VAC SCI B, 17(4), 1999, pp. 1390-1394
Citations number
3
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
ISSN journal
10711023 → ACNP
Volume
17
Issue
4
Year of publication
1999
Pages
1390 - 1394
Database
ISI
SICI code
1071-1023(199907/08)17:4<1390:MGIAPC>2.0.ZU;2-Z
Abstract
A structure integrating a sharp field emission tip inside a coaxial structu re with an overall diameter as small as 60 mu m is described. It can emit n A electron current with a minimum kinetic energy of 50 eV. It is demonstrat ed that this structure behaves like an electron gun and is able to produce a low-energy, divergent and highly coherent electron beam at distances as s mall as 100 mu m from the tip. (C) 1999 American Vacuum Society. [S0734-211 X(99)00604-6].