Sensitivity analysis of the field emitter

Many types of field emitters have been studied up to now to improve the emi ssion current. However, only the ideal parameters are taken into account in some designs. In the fabrication process, the structural parameters of emi tters may change. Therefore, it is useful to analyze the parameter sensitiv ity of the field emitter. This sensitivity should also be included in the d efect function of the optimum design. In this article we propose a method t o calculate the derivative of the electric field and emission current densi ty versus geometrical parameters of emitter. This derivative can be used to represent the parameter sensitivity of the field emitter. Using this metho d, the sensitivities of some parameters in the diode and triode emitters ar e analyzed. (C) 1999 American Vacuum Society. [S0734-211X(99)02604-9].