We have calculated the piezoelectric field and charge distribution for vari
ous III-nitride heterostructures. Our calculations include strain energy mi
nimization and doping effects, and are presented to show the magnitude of p
iezoelectric effects in strained layers. We compare our calculated results
to device results where available. These include the two-dimensional electr
on gas in heterojunction field effect transistors, Schottky diodes with str
ained layers for Schottky height engineering, and III-nitride single quantu
m wells. Calculations that included energy considerations resulted in good
agreement between predicted and observed field and charge distributions for
the heterojunction fields-effect transistors structure. (C) 1999 American
Vacuum Society. [S0734-211X(99)07104-8].