Development of a micromechanical probe-measuring instrument for surface properties characterization

A new type of micromechanical probe-measuring instrument for the characteri zation of micromechanical properties and in situ surface topography has bee n developed. It adopts a load-adding cantilever for surface indentation and a force-sensing cantilever for profile measurement. Both the surface inden tation and the profile measurement are made by using the same diamond probe . The deflected displacement of the cantilever is measured by an optical se nsor. The piezo-driven precision stage with wide motion range and high reso nance frequency is utilized to move the specimen in x and y directions. The effectiveness of this instrument is verified by a test, and the experiment al results are presented.