Micromachined polycrystalline thin film temperature sensors

Polycrystalline thin films based on two elemental semiconducting materials, Si and Ge, have been utilized to fabricate microthermistors. The thermisto rs are designed in a heavy-light-heavy doping concentration arrangement. Th e design, fabrication, analysis and characterization of a variety of thermi stors under different doping schemes is described. Finally, the operation o f the thermistors in self-heating operation is discussed. The results provi de a systematic framework for the application of semiconducting microthermo resistors.