Diagnostics of the ECR Caprice ion source

Spectroscopic investigation in the 10-80 nm spectral range of the plasma ge nerated by an Electron Cyclotron Resonance (E.C.R.) ion source has been rea lized. The results are based on oxygen. OV intensity line ratio measurement s inside the plasma are investigated as a function of the RF power. Results are correlated with the extracted O4+ current. The electronic density and temperature have been derived from the computed results of Kato et al. Fina lly, first determination of ionic densities and lifetimes have been perform ed.