Measurements of potential sputtered H+ with 2D position sensitive detector

In order to study the sputtering mechanism of light atoms by slow highly ch arged ions, H+ ions sputtered by Xe7+ from an untreated C target were measu red with a two-dimensional (2D) position sensitive detector. The kinetic en ergies of Xe7+ at the moment of surface impact were 700 eV to 4200 eV incid ent at 45 degrees with respect to the target normal. We found that (1) the 2D position distribution of sputtered H+ ions, which reflects the initial a ngular and energy distributions, has a single peak with its position shifti ng toward upstream side of the incident ions, (2) this shift increases with decreasing incident energy, and (3) the estimated width of the energy of t he sputtered H+ in the direction parallel to the target is much wider than that of sputtered heavy ions.