Electron Auger spectroscopy is used to study the distribution of Y, Ba, Cu,
and O in the surface layers of YBa2Cu3O7-x, ceramics under the effect of l
aser pulses of varying power at room temperature. Mass transfer processes i
n the surface region of ceramic material are determined by the radiation en
ergy density and the diameter of the laser beam within the ablation zone. I
t is shown that the formation of stoichiometric surface layers is possible
when special laser treatment conditions are used.