Ceramic humidity sensors based on zirconium dioxide

The influence of sintering temperature for ceramic humidity sensors based o n nanophase zirconium dioxide with a specific surface of 110 m(2)/g on thei r adsorption and operation, and the change in their pore structure has been studied. If was also established that nanophase zirconium dioxide is very promising for ceramic humidify sensors. Optimum characteristics are obtaine d with sintering at 900-1100 degrees C which provides a wide range of pores that are responsible for the sensitivity of humidity determination over th e whole measurement range. The greatest sensitivity for high humidity value s is obtained for samples sintered at 1100 degrees C. It was established th at the specific surface of samples differs little with sintering in the ran ge 900-1100 degrees C but it decreases markedly with sintering up to 1300 d egrees C.