The effect of fast secondary electrons on x-ray microanalysis in the scanning electron microscope

Authors
Gauvin, R Hovington, P Drouin, D
Citation
R. Gauvin et al., The effect of fast secondary electrons on x-ray microanalysis in the scanning electron microscope, SCANNING, 21(4), 1999, pp. 238-245
Citations number
18
Categorie Soggetti
Multidisciplinary,"Spectroscopy /Instrumentation/Analytical Sciences
Journal title
SCANNING
ISSN journal
01610457 → ACNP
Volume
21
Issue
4
Year of publication
1999
Pages
238 - 245
Database
ISI
SICI code
0161-0457(199907/08)21:4<238:TEOFSE>2.0.ZU;2-O
Abstract
In this paper, the effect of fast secondary electrons (FSE), which result f rom inelastic scattering of incident electrons, on the characterization of materials in the scanning electron microscope are investigated with the aid of Monte Carlo simulations. The effect of FSE on x-ray microanalysis of li ght elements is investigated. A full description of the Monte Carlo simulat ions of FSE in solids is given.