Fully automated or semi-automated scanning electron microscopes (SEM) are n
ow commonly used in semiconductor production and other forms of manufacturi
ng. Testing and proving that the instrument is performing at a satisfactory
level of sharpness is an important aspect of quality control. The applicat
ion of Fourier analysis techniques to the analysis of SEM images is a usefu
l methodology for sharpness measurement. In this paper, a statistical measu
re known as the multivariate kurtosis is proposed as an additional useful m
easure of the sharpness of SEM images. Kurtosis is designed to be a measure
of the degree of departure of a probability distribution. For selected SEM
images, the two-dimensional spatial Fourier transforms were computed. Then
the bivariate kurtosis of this Fourier transform was calculated as though
it were a probability distribution. Kurtosis has the distinct advantage tha
t it is a parametric (i.e., a dimensionless) measure and is sensitive to th
e presence of the high spatial frequencies necessary for acceptable levels
of image sharpness. The applications of this method to SEM metrology will b
e discussed.