Production of porous carbon thin films by pulsed laser deposition

Pulsed laser deposition (PLD) has been used together with the Glancing Angl e Deposition (GLAD) technique [1,2] for the first time to produce highly po rous structured films. A laser produced carbon plasma and Vapour plume was deposited at a highly oblique incident angle onto rotating Si substrates. r esulting in films exhibiting high bull; porosity and controlled columnar mi crostructure. By varying the substrate rotation rate, the shape of the micr ocolumns can be tailored. These results extend the versatility of the GLAD process to materials not readily deposited by means of traditional physical vapour deposition techniques. (C) 1999 Elsevier Science S.A. All rights re served.