La0.5Sr0.5Co3-delta (LSCO) thin films were deposited on yttria stabilized z
irconia (YSZ) substrates by pulsed laser deposition (PLD) for application t
o thin film solid oxide fuel cell electrodes. During the deposition, the su
bstrate temperature was varied from 450 to 750 degrees C, and the oxygen pr
essure in the chamber was varied from 80 to 310 mTorr. Films deposited at 6
50 degrees C and an oxygen background pressure of 150 mTorr were mostly (10
0) oriented. Deposition at higher temperatures or under lower oxygen pressu
res lead to mostly (110) oriented films. Films with low electrical resistiv
ity of 10(-3) Omega.cm were obtained. (C) 1999 Elsevier Science S.A. All ri
ghts reserved.