MOCVD-processed Ni films from nickelocene. Part II: Carbon content of the deposits

In this study, results are reported on the composition and the electrical a nd magnetic properties of thin films of nickel deposited by metal-organic C VD (MOCVD) from nickelocene. It was found that the films contain carbon, wh ose content decreases with increasing deposition pressure and hydrogen flow rate and with decreasing molar fraction of the precursor. Ferromagnetic pr operties, namely saturation magnetization, Curie temperature, and also elec trical conductivity of the films decrease with increasing carbon content. T he evolution of the saturation magnetization M-s of the films with measurem ent temperature follows Bloch's law. Carbon is found in the films in differ ent forms, namely carbidic (interstitial), aliphatic, or cyclic. Deposition of these forms is discussed and is correlated with the variations of the p roperties of the films.