Monte Carlo simulations of the transport of sputtered particles

Program SPATS models the transport of neutral particles during magnetron sp uttering deposition. The 3D Monte Carlo simulation provides information abo ut spatial distribution of the fluxes, density of the sputtered particles i n the chamber glow discharge area, and kinetic energy distribution of the a rrival flux. Collision events are modelled by scattering in Biersack's pote ntial, Lennard-Jones potential, or by binary hard sphere collision approxim ation, The code has an interface for Monte Carlo TRIM simulated results of the sputtered particles. (C) 1999 Elsevier Science B.V. All rights reserved .