Non-contact measurement scheme checks layer resistance and thickness on wafers

Authors
Bursky, D
Citation
D. Bursky, Non-contact measurement scheme checks layer resistance and thickness on wafers, ELECTR DES, 47(17), 1999, pp. 30-30
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
ELECTRONIC DESIGN
ISSN journal
00134872 → ACNP
Volume
47
Issue
17
Year of publication
1999
Pages
30 - 30
Database
ISI
SICI code
0013-4872(19990823)47:17<30:NMSCLR>2.0.ZU;2-D