Low temperature sol gel deposition of PST (Pb(Sc0.5Ta0.5)O-3) thin films

PST (Pb1+x(SC0.5Ta0.5)O-3) thin films with different amounts of Pb excess ( x=0.05 to 0.2) were deposited onto silicon (Si) substrates via a Sol Gel me thod. The spin-coated films were fired by different methods using different furnaces and characterised by X-ray diffraction (XRD) and scanning electro n microscopic (SEM) observations. In order to deposit films at a low temper ature, the effect of the composition (Pb excess amount) and firing methods on the crystallisation behaviour have been investigated. SEM observations showed that the fired films have a smooth morphology witho ut any cracks or pores. From X-ray diffraction analyses, it was found that firing methods (furnaces used) have significant effects on crystallisation temperature. Hot plate firing enables the perovskite phase to form at a tem perature as low as 520 degrees C, while that phase appears at 700 degrees C in tube furnace firing.