We report on a new process for producing nanostructured materials, hyp
ersonic plasma particle deposition (HPPD), wherein a thermal plasma se
eded with vapor-phase precursors is supersonically expanded through a
nozzle to nucleate ultrafine particles, which are then deposited by hy
personic impaction onto a temperature-controlled substrate. Results fr
om preliminary experiments aimed at synthesizing nanostructured silico
n are presented. (C) 1997 Acta Metallurgica Inc.