Novel CCD-based pH imaging sensor

We propose and demonstrate a novel pH imaging sensor based on the Charge Co upled Device (CCD) technology, This device consists of pH sensing parts, wh ich sense pH value and transform a DH value to electric charges, and conven tional CCD parts, which transfer the electric charges to read out circuit, A thin Si3N4 film which acts as the hydrogen ion-sensitive membrane was use d in the pH sensing him, The prototype devices were fabricated and was conf irmed the device operation using pH equivalent voltages, It was found that the output signal from the imaging sensor was lineally changed from pH 0 to 14 and successfully observed a pH image on a black and white TV monitor.