NANOSTRUCTURE AND CHEMICAL-STATE OF NANOCOMPOSITES PREPARED BY COSPUTTERING METHOD

We prepared two types of nanocomposites by the co-sputtering method: ( a) Si-dispersed in SiO2 Al2O3 or MgO, and (b) MOX/SiO2, MOX/Al2O3 (M: transition metal from Ti to Zn). The nanostructures and the chemical s tates of nanocomposite constituents were characterized by TEM and XPS, respectively. The relationship between the optical properties and the nanostructures were also studied. For Si-dispersed nanocomposites, ph otoluminescence increased during the disproportionation process of SiO X. Quantitative analysis of nanocomposite series, MOX/SiO2 and MOX/Al2 O3 revealed that the concentration of dispersoid did not always agree with simple estimations from the sputtering yield and the area ratio. (C) 1997 Acta Metallurgica Inc.