General model for mechanical stress evolution during electromigration

Citation
Me. Sarychev et al., General model for mechanical stress evolution during electromigration, J APPL PHYS, 86(6), 1999, pp. 3068-3075
Citations number
18
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
JOURNAL OF APPLIED PHYSICS
ISSN journal
00218979 → ACNP
Volume
86
Issue
6
Year of publication
1999
Pages
3068 - 3075
Database
ISI
SICI code
0021-8979(19990915)86:6<3068:GMFMSE>2.0.ZU;2-H
Abstract
A model is presented for the development of stress during electromigration. Formally similar to a thermal stress model, it provides a method of calcul ating all of the components of the stress tensor and clearly couples vacanc y transport and stress evolution with the boundary conditions that apply to the metal. Analytic solutions are discussed for electromigration either no rmal or parallel to a plate. The solution parallel to a plate is used to re interpret x-ray microdiffraction experiments from the literature. We find t hat the effective charge for vacancies in pure polycrystalline aluminum at 533 K is about 0.84. Using parameters that were either measured or calculat ed with the embedded atom method, our model displays good agreement with bo th transient electromigration data and drift data. (C) 1999 American Instit ute of Physics. [S0021-8979(99)01218-9].