Measurement of and compensation for the difference between voltage and current centres in HRTEM

Either a voltage or a current centre is used to find the axis of a transmis sion electron microscope so that a lens axis adjustment can be performed. T he two centres are Plot strictly coincident with each other, although the c oincidence of them is desirable. Therefore, in practice, either centre can be used. The voltage centre is usually adopted for adjusting the lens axis. The distance between the voltage and current centres of a high-resolution transmission electron microscope has been measured in this study. We propos e a method for compensating for the difference between the voltage and curr ent centres which permits both centres to be set simultaneously to the opti cal axis.