Evaluation of silicon nitride and silicon carbide as efficient polysilicongrain-growth inhibitors

Authors
Cha, CL Chor, EF Jia, YM Bourdillon, AJ Gong, H Pan, JS Zhang, AQ Tang, SK Boothroyd, CB
Citation
Cl. Cha et al., Evaluation of silicon nitride and silicon carbide as efficient polysilicongrain-growth inhibitors, J MAT SCI L, 18(17), 1999, pp. 1427-1431
Citations number
15
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF MATERIALS SCIENCE LETTERS
ISSN journal
02618028 → ACNP
Volume
18
Issue
17
Year of publication
1999
Pages
1427 - 1431
Database
ISI
SICI code
0261-8028(199909)18:17<1427:EOSNAS>2.0.ZU;2-X