Spin-on-polymer methylsilsesquioxane for sub-micron intermetal dielectric application

Authors
Chua, CT Sarkar, G Chooi, SYM Chan, L
Citation
Ct. Chua et al., Spin-on-polymer methylsilsesquioxane for sub-micron intermetal dielectric application, J MAT SCI L, 18(17), 1999, pp. 1437-1439
Citations number
7
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF MATERIALS SCIENCE LETTERS
ISSN journal
02618028 → ACNP
Volume
18
Issue
17
Year of publication
1999
Pages
1437 - 1439
Database
ISI
SICI code
0261-8028(199909)18:17<1437:SMFSID>2.0.ZU;2-K